Substrate Wafers
  • Substrate Wafers
Substrate Wafers

Product Description

Substrate wafers serve as foundational materials in semiconductor device manufacturing, providing structural support for functional layer integration. We offer customized substrate wafers tailored to specific technical requirements.

Technical Specifications

ParameterSpecification
​Material​Glass, Quartz, etc.
​Diameter​4”, 6”, 8”, 12” (customizable)
​Diameter Tolerance​±0.01mm
​Min. Thickness​0.2mm (<6”), 0.3mm (8”), 0.35mm (12”)
​TTV (Total Thickness Variation)​<1μm
​Bow​<20μm
​Warp​<30μm
​Surface Quality​20-10 Scratch/Dig
​Surface Roughness (Ra)​<0.2nm
​Edge Profiling​45° chamfer, C0.2±0.1mm
​Coating Options​AR, HR, Beamsplitter coatings

Note: Fully customizable to meet specific client requirements.

    相关产品