Photolithography Wafers
Customization Supported: Yes
Shipping Location: Shenzhen, Guangdong Province, China
Brand: Dinghongrun
E-mail: dhr@dinghongrun.com
WhatsApp: +8613629515219
Technical Specifications
| Process | Capability & Precision |
|---|---|
| Photoresist Coating | Spin Coating: Thickness accuracy ≤ 3% (flat surfaces) |
| Photoresist Coating | Spray Coating: Thickness accuracy ≤ 10% (flat/irregular surfaces) |
| Lithography Accuracy | 2μm registration accuracy: 0.15μm |
| Development Accuracy | 2μm development uniformity < 5% |
| Etching Dimensional Tolerance | ±1μm |
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